Photoactivation of Semiconductor Gas Sensors Operating at Room Temperature

Abstract

A new approach to operate semiconductor gas sensor at room temperature is described. The effects of UV-light illumination on the performance of Sn02 and In203 thin film gas sensors toward CO, NO2 and CH4 are reported. The sample were prepared with DC sputtering in Ar atmospheres by the R.G.T.O. technique and with reactive magnetron sputtering in Ar and O2 atmosphere respectively. Results are promising for the development of a sensor working at room temperature.