Abstract
The heterodyne interferometric system based on phase measurement plays a significant role in modern metrology fields owing to its convenience of signal processing. In this paper, a phase measurement scheme to determine the fraction of the interference fringe modulated by a PZT in a differential single-frequency interferometer is investigated. To overcome the problem of phase jump and inhomogeneous period of the signal, a differential phase discrimination approach with an external trigger signal is presented. The phase measurement system is carried out using a field-programmable gate array (FPGA) device. It is testified by experiments that, over a frequency range of 300 Hz–10 kHz, the phase measurement system has a stability of ±0.015°; and a maximum error of ±0.07°.
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