Abstract
A new method for both the phase-height mapping and the 3-D coordinate calibration in phase-measuring profilometry (PMP) is presented. A calibration gauge containing four virtual calibration planes is designed. The application of the calibration gauge avoids the translation of the standard plane during the calibration process. Furthermore, circular steps are designed to calibrate lateral coordinates automatically. With this calibration gauge, both the phase-height mapping and lateral coordinates calibration could be done simultaneously through only one measurement. Additionally, to recover a continuous phase distribution of all the steps with the same height, an iterative procedure is proposed. The effectiveness of the proposed method is demonstrated by experimental results.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
