Both phase-height mapping and coordinates calibration in PMP

Abstract

A new method for the system calibration in phase-measuring profilometry (PMP) is presented. A new calibration gauge containing four virtual calibration planes is designed. With this calibration gauge, both the phase-height mapping and 3D coordinates calibration could be done simultaneously through only one measurement. Additionally, to recover continuous phase distribution of all steps with same height, an iterative procedure is proposed. The effectiveness of the proposed method is demonstrated by experimental results. (<i>Summary only available</i>)