Abstract
Diamond-like carbon (DLC) films were deposited on tungsten (W) tips under the KrF excimer laser in a laser chemical vapor deposition (LCVD) chamber. Raman spectroscopy showed that the deposited DLC films were phase-graded along the tips from the apexes. The DLC films were more diamondlike at or near the tip apexes. From numerical simulation, there is a strongly confined and enhanced optical field at the tip apexes. The simulation also indicates that there is an optical-field gradient from tip apexes to tip bodies. Therefore, the variations in the phases of deposited DLC films were attributed to the corresponding variations in local optical intensities along the tips. Hence, optical local near field was confirmed to be responsible to the DLC deposition.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
