Abstract
Phase transformations of molybdenum under ion implantation with metal and gas ions have been studied by means of transmission electron microscopy. It is shown that, as a result of ion mixing of the surface-adsorbed gas elements of the ion source, thin (⩽ 100 nm) solid layers of the interstitial phases may be formed in the ion-implanted layers. The mechanisms of formation of the structure found are discussed by investigating the crystallographic details of phase transformations.
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