Abstract
In this work we review principles and applications of a method of phase shifting profilometry with using of optical vortices imbedded into the probe beam. High spatial resolution caused by vortex phase sensitivity is analysable to retrieve the 2D and 3D shape of optically transparent and reflecting surfaces with exceeding of optical diffraction limit. This method applicable for non-destructive testing of thin films, live cells and biological tissues in real-time regime. Automatic processing of vortex interferograms with vortex phase shift analysis allow to achieve a vertical resolution down to 1,75 nm.
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