Abstract
In this research we develop a principle of optical vortex phase analysis and its application to surface imaging with high accuracy measurements in nanoscale range. Two-coordinate scanning of the sample allow to retrieve an information about shape and roughness for optically transparent and reflecting surfaces exceeding optical diffraction limit. The interference between singular beam and reference wave, in general, carrying optical vortex with single or doubled topological charge allow to extract the data about phase delay caused by surface features or refraction. This method is also applicable for non-destructive testing of biological structures and live cells in real-time regime. Automatic processing of vortex interferograms allow to achieve a vertical and longitudinal resolution down to 1,75 nm and 7 nm respectively for visible light sources.
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