Abstract
We present a resonant micromechanical magnetic field sensor, which utilizes the magnetically induced change in elastic modulus, i.e., the delta-E effect. The sensor is based on magnetoelectric thin film composites, resulting in high sensitivity at room temperature and at low frequencies. The cantilever is electrically excited and read out by a 2 μm AlN piezoelectric layer. Depending on its magnetization, the 2 μm thin film of amorphous (Fe90Co10)78Si12B10 changes its elasticity, which results in a shift of the cantilever's resonance frequency. The sensor is operated in the first or second transversal bending mode at 7.6 kHz or 47.4 kHz. With a limit of detection of 140 pTHz−0.5 at 20 Hz under a magnetic bias field and 1 nTHz−0.5 without external bias field, this sensor exceeds all comparable designs by one order of magnitude.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
