Abstract

Frequency doubling is observed in an aluminum nitride waveguide deposited by dc reactive magnetron sputtering. Phase-matching conditions are obtained by tuning the wavelength of an optical parametric oscillator pumped by a pulsed Nd:YAG laser. The maximum second harmonic generation efficiency is obtained for the TM0(ω)-TM2(2ω) conversion process and is estimated to be around 4×10−8 W−1.

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