Phase Identification of Individual Particles by Electron Backscatter Diffraction (EBSD)

Abstract

Backscattered electron Kikuchi patterns (BEKP) were first observed by Alam et al. in 1954. J.A. Venables and C.J. Harland made the initial observation of BEKP and in the scanning electron microscope in 1973. In 1996, Goehner and Michael developed an electron backscatter diffraction (EBSD) system that uses a 1024 × 1024 pixel CCD camera coupled to a thin scintillator rather than photographic film. In their system, the quality of the raw patterns is improved by the use of “flat fielding” which normalizes the raw image to a “flat field” reference image that contains the image artifacts, including background, but not the crystallographic information. Automated pattern analysis is carried out using a Hough transform to locate bands and band edges in the pattern. The resulting crystallographic information is coupled with the elemental information from energy or wavelength dispersive x-ray spectrometry and the phase is identified is made through a link to a database such as the Powder Diffraction Files published by ICDD. An indexed pattern of the suspected phase is then synthesized for comparison to the unknown. This system is marketed commercially by Noran Instruments and offers the first practical method for rapid identification of unknown crystallographic phases in the SEM.