Phase Formation and Properties of Mod Derived (Na0.52K0.48)NbO3 Thin Films

Abstract

Lead-free piezoelectric (Na0.52K0.48)NbO3 (KNN) thin films were prepared on Pt/TiO2/SiO2/Si substrates by metallorganic compound decomposition (MOD) method. We discussed the formation mechanism of KNN perovskite phase, it was found that the K4Nb6O17 phase formed first and coexited with KNN phase at lower temperature. With increasing temperature, the diffraction intensity of KNN phase increased gradually, and the pure KNN phase was obtained at 650°C. The KNN thin films possessed higher dielectric constant and lower dielectric loss, and the values of dielectric constant and loss are about 693 and 0.022, respectively. Meanwhile, the ferroelectric, piezoelectric properties and I-V characteristics of KNN thin films were measured and discussed.