Abstract
We report a perpendicular magnetic tunnel junction (p-MTJ) with a thin FeTa insertion layer showing good thermal stability against 400 °C. Spherical-aberration-corrected scanning transmission electron microscopy (Cs-corrected STEM) was utilized to analyze its atomic-level structures, revealing that the good-thermal-stability p-MTJ with a FeTa insertion layer exhibited a clear interface between the body-centered-cubic (bcc) (001) CoFeB reference layer and the face-centered-cubic (fcc) (111) (Co/Pt) multilayers. It was concluded that the control of the interface between these two different lattices is the key to realizing good p-MTJ thermal stability against the 400 °C back-end-of-line process.
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