Abstract
Helicon discharges are known for their ability to produce high densities of partially ionized plasma, their efficiency arising from an unusual mechanism of rf coupling. However, the requirement of a dc magnetic field has prevented their wide acceptance in industry. The use of permanent magnets greatly simplifies helicon sources, and arrays of small sources extend the use of helicons to the processing of large substrates. An eight-tube array was designed and constructed, and its density uniformity measured in a 53×165 cm2 chamber. Three innovations involved (a) the remote field of ring magnets, (b) a low-field density peak, and (c) rf power distribution. High-density plasmas uniform over large areas requires compatibility in all three areas.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
