Abstract
The Low Gain Avalanche Detector (LGAD) technology is proposed for the ATLAS High Granularity Timing Detector (HGTD) and the CMS Endcap Timing Layer (ETL) towards the High-Luminosity Large Hadron Collider (HL-LHC), for which radiation hardness is one of the key requirements. In this paper we report results from the measurements on LGAD sensors designed by the University of Science and Technology of China (USTC) and fabricated by the Institute of Microelectronics of the Chinese Academy of Science (IME, CAS). These sensors have been irradiated with irradiation fluences of 8×1014, 1.5×1015, 2.5×1015 and 6×1015 cm−2 1 MeV neutron equivalent. Both un-irradiated and irradiated sensors were measured with a 90Sr-based beta scope at −30∘C to extract the collected charge and time resolution. The results show that sensors with carbon implantation can provide collected charge of more than 4 fC and time resolution better than 70 ps at appropriate bias voltage even for the equivalent fluence of 2.5×1015 cm−2. Both the collected charge and the time resolution meet the design specification of HGTD.
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