Abstract
In this report we demonstrate the successful 80kV alignment of a double aberration corrected TEM/STEM (JEM-Z3100F-R005) equipped with a cold field emission gun designed to operate at 300kV. In TEM mode we demonstrate information transfer out to 0.078nm in the corresponding power spectrum. For high angle annular dark-field STEM, direct resolution of the 0.082nm Ge (444) dumbbells was achieved. The energy spread of the primary electron beam was studied using energy-loss spectroscopy. Reduction of the extraction anode voltage (A1) to 1.2kV results in an energy resolution in the primary electron beam, taken as the full width half maximum (FWHM) of the zero loss peak, of 0.28eV with a corresponding beam current of 12pA whereas operation of A1 at 1.5kV results in a FWHM at the zero-loss peak of ∼0.4eV for a beam current of 1.1nA.
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