Abstract
Performance of 0.4-μm Linewidth SAW Interdigital Transducers Fabricated by Scanning-Electron-Beam Lithography
Published Version
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https://doi.org/10.1109/t-su.1980.31203
Copy DOIPublication Date: Nov 1, 1980 | |
Citations: 2 |
Performance of 0.4-μm Linewidth SAW Interdigital Transducers Fabricated by Scanning-Electron-Beam Lithography
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