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Abstract
This paper reports a novel design and analysis of RF MEMS switch with two movable electrodes to achieve a simultaneous improvement in actuation voltage along with the switching time. About 30% improvement in the actuation voltage along with a 50% reduction in switching time can be obtained with such design. Moreover a stiction free fabrication methodology is presented to fabricate the switch, which involves the use of two bulk micromachined silicon substrates bonded together.
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