Abstract
This article concerns the characterization of the stability and performance of a motorized stage used in laser direct writing lithography. The system was built from commercial components and commanded by G-code. Measurements use a pseudo-periodic-pattern (PPP) observed by a camera and image processing is based on Fourier transform and phase measurement methods. The results report that the built system has a stability against vibrations determined by peak-valley deviations of 65 nm and 26 nm in the x and y directions, respectively, with a standard deviation of 10 nm in both directions. When the xy-stage is in movement, it works with a resolution of 0.36 µm, which is an acceptable value for most of research and development (R and D) microtechnology developments in which the typical feature size used is in the micrometer range.
Highlights
In microfabrication and micro-electronics industries, a widely used method for the realization of microstructured features consists in realizing the desired circuit on a binary mask and transferring these features on a series of substrates by a photolithography process
The authors report on the performance characterization of a stacked xy-stage, which is part of a laser direct writing photolithography system made from commercial elements
The characterization was carried out by means of pseudo-periodic pattern (PPP) and a visual method based on Fourier transforms
Summary
In microfabrication and micro-electronics industries, a widely used method for the realization of microstructured features consists in realizing the desired circuit on a binary mask and transferring these features on a series of substrates by a photolithography process. When low-series or single units are needed, especially for research and development (R and D) purposes, the realization of a photolithography mask becomes an intermediary step that presents significant drawbacks in regard to cost and delays. For this reason, several mask-less photolithography techniques have been developed recently.
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