Abstract
Single point diamond knives have been used to machine to microinch tolerances. This micromachining can also produce optics of high quality. Optical micromachining capabilities in terms of materials, shapes, and optical figure are discussed. Comparisons are made between micromachined mirrors and superpolished surfaces including reflectivity, absorption, scatter, roughness, autocorrelation length, and Nomarski microscopy. 10.6-microm pulsed damage data and preliminary 10.6-microm cw damage investigations are also reported. Micromachined well with superpolished samples.
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