Abstract
As recently as 25 years ago, high vacuum pumping was accomplished using mostly diffusion pumps and oil-sealed mechanical pumps. Now, there are alternate technologies available: ion-gettering pumps, turbomolecular pumps, and cryopumps. To be able to make an appropriate selection for a given application, a user should be familiar with properties of each pump. Here, the discussion is limited to mechanical, turbomolecular and vapor jet or diffusion pumps. The following topics are considered: concept of a vacuum pump as a compressor, displacement and pressure ratio characteristics of vacuum pumps, meaning of ultimate pressure and pumping speed in reference to partial pressures, staging problems between high and rough vacuum pumps, steady state, transient and overload conditions, and similarities between diffusion and turbomolecular pumps.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
