Abstract
An oxygen radical beam source discharged by radio frequency was newly designed and constructed. Effects of wall materials on the optical emission intensity of the oxygen plasma and the atomic oxygen flux were measured. The optical emission intensity correlated well with the intensity of the atomic oxygen flux. An atomic oxygen flux as high as 1.4×1016 atoms/(cm2 s) was achieved at 50 mm away from an end plate, with nine orifices, of the radical beam source by using a sleeve made of pyrolytic boron nitride in the beam source.
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