Abstract
Piezoelectric ultrasonic motors offer important advantages for motion applications where high speed is coupled with high precision. The advances made in the recent decades in the field of ultrasonic motor based motion solutions allow the construction of complete motion platforms in the fields of semiconductors, aerospace and electro-optics. Among the various motor designs, the L1B2 motor type has been successful in industrial applications, offering high precision, effective control and operational robustness. This paper reviews the design of high precision motion solutions based on L1B2 ultrasonic motors—from the basic motor structure to the complete motion solution architecture, including motor drive and control, material considerations and performance envelope. The performance is demonstrated, via constructed motion stages, to exhibit fast move and settle, a repeatability window of tens of nanometers, lifetime into the tens of millions of operational cycles, and compatibility with clean room and aerospace environments. Example stages and modules for semiconductor, aerospace, electro-optical and biomedical applications are presented. The described semiconductor and aerospace solutions are powered by Nanomotion HR type motors, driven by a sine wave up to 80 V/mm rms, having a driving frequency of 39.6 kHz, providing a maximum force up to 4 N per driving element (at 5 W power consumption per element) and a maximum linear velocity above 300 mm/s. The described electro-optical modules are powered by small Nanomotion Edge motors driven by voltages up to 11 V AC, providing stall forces up to 0.35 N (power consumption up to 0.75 W) and maximum linear velocity above 200 mm/s.
Highlights
First suggested in the 1970s [1], were developed during subsequent decades [1,2] in response to the semiconductor industry’s increasing demand for precise nonmagnetic positioners; this development was supported by the increasing availability of high quality lower cost piezoelectric ceramics
While the efficiency of an electromagnetic motor is size-dependent, the efficiency of the piezoelectric motor does not change with size, making small piezoelectric motors prime candidates for use in small mechanical systems
The offered products had evolved from a standalone motor to a complete motion solution consisting of a motor, a moving stage, a closed loop feedback circuit, a driver and a motion controller with programming support, all attuned to provide optimal motion and positioning performance [3]
Summary
First suggested in the 1970s [1], were developed during subsequent decades [1,2] in response to the semiconductor industry’s increasing demand for precise nonmagnetic positioners; this development was supported by the increasing availability of high quality lower cost piezoelectric ceramics. The advantages of small piezoelectric ultrasonic motors, as compared to the standard electromagnetic ones with the same size and weight, include high power density and efficiency (both of which are not size sensitive), high torque at low speeds and low power, non-magnetic properties (leading to no generation of electromagnetic noise and no dependence on external electromagnetic fields), quiet drive, no gear mechanism (thereby saving space and reducing complexity), quick response and short settling times, hard brake, no backlash and no energy consumption while holding position. The discussed applications come from the high-end solutions in the fields of aerospace, semiconductors, biomedical and electro-optics
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
