Abstract
We report a face-shear mode ultrasonic motor (USM) made of [011]c poled Zt ± 45° cut 0.24Pb(In1/2Nb1/2)O3-0.46Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 single crystal, which takes advantage of the extremely large d36 = 2368 pC/N. This motor has a maximum no-load linear velocity of 182.5 mm/s and a maximum output force of 1.03 N under the drive of Vp = 50 V, f = 72 kHz. Compared with the k31 mode USM made of Pb(Zr,Ti)O3 (PZT), our USM has simpler structure, lower driving frequency, much higher electromechanical coupling factor, and twice power density. This USM can be used for low frequency operation as well as cryogenic actuation with a large torque.
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