Abstract
Sculptured or Bossed diaphragm is a specialized geometry with rigid center or boss. This paper presents the outcome of design approaches of sculptured diaphragm structure for low pressure applications. The simulation results are obtained using Intellisuite MEMS CAD design tool. The results indicate that sculptured diaphragm are designed with minimum thickness, compensating the large (a/h) ratio with local stiffening by means of rigid center and better linearity. Further, the maximum stress regions are analyzed for fixing the position of the piezoresistor. Finally, the sensitivity is improved by using the Silicon-On-Insulator (SOI) diaphragms.
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