Abstract
The paper considers a question of modifying thin amorphous carbon (a-C) films with palladium (Pd) nanoparticles (a-C<Pd>) synthesized by magnetron ion-plasma co-sputtering of a combined target. Raman studies revealed the effect of the Pd concentration on the structure of amorphous carbon films. The dependence of the electronic properties of a-C films on the Pd concentration is shown. It was detected that the variation of Pd content from 0.175 to 1 at.% changes the conductivity of the films by 108.
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