Abstract
New theoretical and experimental results of microwave acoustic wave propagation in diamond-based multilayer piezoelectric structures (MPS) as “Me1/(Al,Sc)N/Me2/(100) diamond/Me3” and “Me1/AlN/Me2/(100) diamond/Me3” under three metal film depositions, including the change in the quality factor Q as a result of Me3 impact, were obtained. Further development of our earlier studies was motivated by the necessity of creating a sensor model based on the above fifth layered MPS and its in-depth study using the finite element method (FEM). Experimental results on the change in operational checkpoint frequencies and quality factors under the effect of film deposition are in satisfactory accordance with FEM data. The relatively small decrease in the quality factor of diamond-based high overtone bulk acoustic resonator (HBAR) under the metal layer effect observed in a wide microwave band could be qualified as an important result. Changes in operational resonant frequencies vs. film thickness were found to have sufficient distinctions. This fact can be quite explained in terms of the difference between acoustic impedances of diamond and deposited metal films.
Highlights
The development of acousto-electronic sensors intended for various applications such as biology, fine physicochemical studies, analysis of the gas composition of the atmosphere, and detection of explosives is in active progress
Thickness ranges of film deposition substrates the experiment were applied
TheThe thickness ranges of film deposition
Summary
The development of acousto-electronic sensors intended for various applications such as biology, fine physicochemical studies, analysis of the gas composition of the atmosphere, and detection of explosives is in active progress. In [1], the concentration of various gases was recorded at the level of one ppb This high resolution was achieved due to the unique sensory properties of graphene. The authors in [4] described an application of the nanoelectromechanical system (NEMS) device to ultrasensitive mass detection and measured the Au film mass deposition with the resolution of some attograms. Such sensors had to satisfy the high demands of the experiment arrangement such as a high vacuum and precise temperature control at low temperatures. Acousto-electronic sensor devices have some advantages in this field
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