Abstract
This work reports a PDMS-based hot embossing technique. The proposed method enables rapid, low-cost and mass-produced fabrication of SU-8 photoresist conical nozzle for inkjet print-head with soft PDMS moulds. The hydrophobic time for SU-8 master mould treated by trimethyldichlorosilane (TMCS) was determined. And the optimised thickness of SU-8 photoresist before hot embossing was 58.5 ± 1.55 μm corresponding to 3750 r/min of spin coating speed. The imprinting parameters were investigated. The highest replication precision was obtained in the embossed SU-8 conical nozzle processed by an embossing pressure of 2.57 MPa, an embossing temperature of 80°C, and an embossing time of 6 min. Finally, this work presents the fabrication of the SU-8 conical nozzle plate with the large aperture of 40.01 ± 1.24 μm, small aperture of 27.12 ± 1.07 μm, and the nozzle height of 50 ± 1.26 μm.
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