Abstract

Localized surface plasmon-enhanced diamond UV photodetectors with different diameters of Pd nanoparticles (NPs) had been successfully fabricated. Four Pd NPs with diameters of 20, 40, 60, 70 nm were deposited on diamond surfaces, respectively, and their height was 20 nm. Ti/Ni/Au metal electrodes were patterned on samples surfaces to form UV photodetectors. According to photoelectric performance test results, responsivities were enhanced with sizes of particles increasing at UV region, and diamond photodetector with 40 nm NPs showed the highest photocurrent-to-dark current ratio and UV-to-visible rejection ratio. Compared with pure diamond photodetectors, the responsivity and UV/visible rejection ratio Pd modified detectors can improve up to 3250 and 34 times, respectively. Plasmonic scattering effect was used to explain this phenomenon, and it is further confirmed by the simulated scattering cross-section.

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