Abstract
An Al2O3 thin film is deposited on the interdigitated electrodes to fabricate a resistive hydrogen sensor. In addition, the Pd nanoparticles (NPs)/Pd film by vacuum thermal evaporation system on the Al2O3 film acts as catalytic metals for hydrogen detection. Due to the Pd NPs with an increased surface area to volume ratio as well as the spill-over effect, the catalytic activity could be improved to enhance the gas sensing performance. The experimental results showed that the sensing response ratio is 14.4% in 1000 ppm H2/air at 300 °C, which is suitable for high-temperature hydrogen detection. The studied Pd NPs/Pd/Al2O3 resistive sensor exhibits the advantages of in high-temperature operation, simple structure, easy fabrication process, and relatively low cost.
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