Abstract
We have fabricated transparent and electrically conductive single-wall carbon nanotube (SWCNT) thin films for liquid crystal switching electrodes. The SWCNT film had a sheet resistance of 91.02 Ω/□ and a transmittance of 92.33% at 550 nm. Our CNT-based transparent conducting film (TCF) patterning technique is a combination of photolithography and O2 plasma etching. We were able to pattern CNT-TCFs with a high resolution, and as small as 4 µm, and to fabricate them with various shapes and patterns. Our CNT-TCFs were used to successfully switch liquid crystal cells with 100 µm and 15 mm line widths.
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