Abstract
A flower-like RuO2 nanostructure was selectively synthesized on a Si substrate by metal organic chemical vapor deposition (MOCVD). Bis(ethylcyclopentadienyl) ruthenium(II), Ru[(C2H5)C5H4]2, was shower sprayed onto the Si substrate with oxygen gas. Prior to the growth of the flower-like RuO2 nanostructure, patterns of Al and Fe films were deposited on the Si substrate by photolithography and electron beam (e-beam) evaporation deposition. The synthesized flower-like RuO2 nanostructures were examined by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive X-ray (EDX) analysis, X-ray diffraction (XRD), and micro-Raman spectroscopy. The results indicated that the flower-like nanostructures were RuO2 rutile structures with high crystallinity. For the particular synthesized morphology and design pattern, the current density and long-term stability characteristics of electron field-emission characteristics demonstrated that the flower-like RuO2 nanostructure has the potential to be used in a practical field-emission display.
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