Abstract
Helical architecture, a meta-atom to manipulate electromagnetic waves effectively, is widely utilized in the chiro-optical field, however, troublesome to construct at the nanoscale. This paper proposes an error-adaptive pattern generation tool to provide a highly accurate routine for focused ion beam induced deposition. Following the routine, a 3D construction model predicts the additive structure morphology as a reference for pattern optimization and parameters modification, with the consideration of the beam heating effect and re-emitted precursor molecules. Guided by the simulation results, controllable and configuration-complex nanohelices can be constructed with high resolution under different accelerating energies down to 5 kV. The minimum helical wire diameter can reach 85 nm and the distance between the helical wires is down to 30 nm. The downward helical wire can extend to almost 10 μm long. Moreover, various helical structures are constructed to enrich the family of nanohelices. This work provides reliable processing strategies and enriches helical architecture forms fabricated by focused ion beam induced deposition, thereby introducing higher tunability into the chiro-optical properties within the visible range.
Published Version
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