Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition.

Lukas Keller,Michael Huth

doi:10.3762/bjnano.9.240

Abstract

Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the electron beam’s movement, and thereby reliably map the desired target 3D structure from a purely geometrical description to a shape-conforming 3D deposit, is nontrivial. To address this issue we developed several writing strategies and associated algorithms implemented in C++. Our pattern file generator handles different proximity effects and corrects for height-dependent precursor coverage. Several examples of successful 3D nanoarchitectures using different precursors are presented that validate the effectiveness of the implementation.

Highlights

New physical effects and functionalities can arise when the third dimension can be accessed at the nanoscale
Adopting general guidelines for optimizing the 3D writing strategy [22,24], we showed in a collaborative work that highquality complex ferromagnetic 3D nanoarchitectures for studying magnetically frustrated systems can be fabricated by focused electron beam induced deposition (FEBID) [25,26]
Two gas injection systems were used for the precursors, Me3CpMePt(IV) and HCo3Fe(CO)12 operating at 45 °C and 65 °C, respectively

Summary

Introduction

New physical effects and functionalities can arise when the third dimension can be accessed at the nanoscale. Novel physics may arise, as is the case in nanomagnetic 3D structures which can, for example, show novel types of magnetic domain walls [3], or concerning magnetically frustrated interactions in 3D artificial spinice systems [4]. Being able to fabricate 3D nanostructures is beneficial for both the development of new technological applications and addressing more fundamental research questions. Several sophisticated techniques have been developed to prepare 3D nanostructures, but fabrication without constraints on their shape and material composition remains an enormous challenge. One state-of-the-art approach to fabricated 3D systems on the nanoscale uses a layer-by-layer based technique [4]. For each slice a full set of structure-definition steps, typically combining phys-

Results

Discussion

Conclusion