Abstract
We have investigated the formation of nanosized structures on InP(111) surfaces after 1.5MeV Sb implantation. Scanning probe microscope (SPM) has been utilized to investigate the size, height and the density distributions of the nanostructures as a function of ion fluence. We observe nanostructures smaller than 100nm and lower than 4nm at all fluences. Moreover in large nanostructures we observe agglomeration of several smaller structures. We have also investigated the rms surface roughness of the InP(111) surfaces after MeV implantations.
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