Abstract
We have studied the surface modifications as well as the surface roughness of the InP(111) surfaces after 1.5 MeV Sb ion implantations. A scanning probe microscope has been utilized to investigate the ion-implanted InP(111) surfaces. We observe the formation of nanoscale defect structures on the InP surface. The density, height, and size of the nanostructures have been investigated here as a function of ion fluence. The rms surface roughness, of the ion implanted InP surfaces, has also been investigated. Raman-scattering results demonstrate that at the critical fluence, where the decrease in surface roughness occurs, the InP lattice becomes amorphous.
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