Abstract
The main limitation of high-temperature piezoresistive pressure sensors is the variation of output voltage with operating temperature, which seriously reduces their measurement accuracy. This paper presents a passive resistor temperature compensation technique whose parameters are calculated using differential equations. Unlike traditional experiential arithmetic, the differential equations are independent of the parameter deviation among the piezoresistors of the microelectromechanical pressure sensor and the residual stress caused by the fabrication process or a mismatch in the thermal expansion coefficients. The differential equations are solved using calibration data from uncompensated high-temperature piezoresistive pressure sensors. Tests conducted on the calibrated equipment at various temperatures and pressures show that the passive resistor temperature compensation produces a remarkable effect. Additionally, a high-temperature signal-conditioning circuit is used to improve the output sensitivity of the sensor, which can be reduced by the temperature compensation. Compared to traditional experiential arithmetic, the proposed passive resistor temperature compensation technique exhibits less temperature drift and is expected to be highly applicable for pressure measurements in harsh environments with large temperature variations.
Highlights
In recent years, universal high-temperature piezoresistive pressure sensors have been extensively applied in the fields of petrochemicals, energy and electric power, and aerospace
“ 0 Compensation of temperature coefficient of sensitivity. It can be seen from these equations that compensating for the temperature coefficient of offset requires the sensor output voltage under the initial load pressure P0 (P1) to be requires the sensor output voltage under the initial load pressure P0 (P1 ) to be independent of the temperature
The test results for the high-temperature piezoresistive pressure sensor with passive resistor seen by comparing Figures 8 and 12, the output sensitivity falls by 70% under the proposed method
Summary
Universal high-temperature piezoresistive pressure sensors have been extensively applied in the fields of petrochemicals, energy and electric power, and aerospace. +TCR where RB is the bridge arm resistance, TCRB is the temperature coefficient of RB , VOS is the bridge zero output voltage, and α is the temperature coefficient of the output voltage sensitivity [6]. Have almost the same initial values, and neglect the influence of residual stress caused by the fabrication These equations assume that the four bridge arm resistances and their temperature coefficients process. The compensation applied to the temperature coefficient of the offset and the have almost the same initial values, and neglect the influence of residual stress caused by the sensitivity would be invalid [7,8]. The compensation applied to the temperature coefficient of the offset proposed uses actual sensor measurement data, and is independent of residual and the sensitivity would be invalid [7,8].
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