Abstract
Improved laser output is demonstrated in KrF and XeCl lasers with x-ray preionization. The influence of gas composition, preionization geometry, x-ray dose,E/p value and temporal delay between x-ray pulse and laser discharge is discussed. In XeCl lasing has been achieved with an x-ray dose of 0.2 mR whereas approx. 3 mR are required for KrF. For both systems, the highest output energy and the lowest possibleE/p ratio were observed with Ne buffered gas mixtures. Dissociative attachment to halogen molecules on a ns time scale supported by a relatively slow laser voltage rise is recognized as the main electron loss channel preventing a long lifetime of the preionization electrons. High preionization intensity is thus desirable at the moment of voltage breakdown.
Published Version
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