Abstract
The selective nature of wet oxidation of high Al content AlGaAs has been successfully employed in the fabrication of various highly efficient, low-threshold-current vertical cavity surface emitting laser (VCSEL) structures. For this technology to be used in batch manufacturing in a predictable way, a thorough understanding of the oxidation process is required. We describe a study on the kinetics of oxidation. We, for the first time, report our studies on the dependence of wet oxidation process on important process parameters like water bubbler temperature and N/sub 2/ gas flow rate.
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