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Abstract
Monte Carlo electron trajectory simulations have been adapted to run on a parallel supercomputer. The increased speed achieved by parallelization of the Monte Carlo code results in the ability to model small probability events easily. The techniques for parallelization of the algorithm are presented here along with examples of applications. The applications include the calculation of the X-ray spatial resolution in thin films, backscattered electron imaging of voids in Al metallizations and X-ray production in thin-film specimens.
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