Abstract
Atomic Layer Deposition is one step in the industrial manufacturing of semiconductor chips. It is mathematically modeled by the Boltzmann equation of gas dynamics. Using an expansion in velocity space, the Boltzmann equation is converted to a system of linear hyperbolic equations. The discontinuous Galerkin method is used to solve this system. The speedup becomes near-perfect for the most complex two-dimensional cases. This demonstrates that the code allows for efficient parallel computation of long-time studies, in particular for the three-dimensional model.KeywordsBoltzmann EquationAtomic Layer DepositionCoarse MeshDiscontinuous Galerkin MethodInitial MeshThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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