Abstract
A statistical theory of kinematical X-ray diffraction on nanostructured crystalline systems with quantum dots (QDs) has been developed with allowance for a spatial correlation of QDs. The lateral distribution of QDs in an epilayer is described using a two-dimensional paracrystalline model. The angular distribution of diffuse X-ray scattering intensity was numerically simulated and analyzed depending on the degree of lateral ordering of QDs.
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