High-Resolution X-Ray Scattering from Thin Films and Multilayers

Abstract

Part 1 Experimental realization: basic elements of an equipment resolution elements diffractometers and reflectometers. Part 2 The theory of X-ray diffraction and its realization by the experiment: kinematical X-ray scattering from ideal crystals kinematical X-ray diffraction from deformed thin layers kinematical X-ray diffraction from randomly disturbed layers dynamical X-ray diffraction in perfect layers dynamical X-ray diffraction in slightly deformed layers optical reflection of X-rays from ideal layers optical reflection of X-rays from layers with rough interfaces dynamical X-ray diffraction in strongly asymmetric cases grazing incidence diffraction (GID). Appendices: elements of the formal theory of scattering structure factors, dispersion corrections and extinction length.