(Paper CH011) effect of strain, microstructure, and interfaces on tunability and relaxor-like dielectric behavior in barium strontium titanate thin-films

Abstract

We present the results of a systematic study of sputter deposited barium strontium titanate (BST) thin-film planar capacitors to better understand the effects of strain, microstructure, and interfaces on their tunability and relaxor-like dielectric behavior. Asymmetric x-ray diffraction measurements were employed to determine the structure and strain state of epitaxial and polycrystalline BST thin-films thinner than 100 nm. Electrical measurements at temperatures ranging from room temperature down to liquid helium assist in the isolation of competing mechanisms for time-dependent and field-dependent dielectric response.