Pairing electrostatic levitation with triboelectric transduction for high-performance self-powered MEMS sensors and actuators

Abstract

We demonstrate that an electrostatic levitation microelectromechanical systems (MEMS) switch can be operated by applying mechanical pressure to a triboelectric generator. The toggling mechanism of the switch draws no current but requires a high actuating voltage, while the generator can supply a high voltage but only produces microwatts of power. The synergistic combination results in an entirely self-powered sensor and switch; the normally closed MEMS switch can be toggled open by applying a threshold force to the generator without the need for any outside power or supplementary circuitry. A model of the MEMS switch and electrostatic force is validated with experimental data. An output voltage vs input force relationship for the generator is experimentally extracted.