P3P-5 Fundamental Study on Array Type Medical Ultrasound Probe with Hydrothermally Synthesized PZT Poly-Crystalline Film

Abstract

In this study, in order to apply the hydrothermally synthesized piezoelectric polycrystalline films to the medical miniature 1-dimensional array type ultrasound probes with resonance frequency of 10 MHz, the hydroxyapatite was employed as the material for the substrate. After sputtering of pure titanium on the surface of hydroxyapatite substrate, the titanium film was etched using photo-etching method to form 1-dimensional titanium film electrodes array with element pitch of 75 mum, element width of 40 mum and element length of 4mm in order to scan ultrasound beam electronically by sector scan mode using phased array technique. We tried to deposit PZT poly-crystalline film hydrothermally on the titanium film electrodes. The deposited PZT poly-crystalline film has thickness of about 10 mum on the 1-dimensional array titanium electrode pattern. We could succeed trial fabrication of the miniature 1-dimensional array type ultrasound probe. The sputtered and etched titanium film electrodes were used as the electrodes for signal lines of the 1-dimensional array type ultrasound probe. Furthermore, a gold electrode was deposited as a common ground electrode all over the surface of 1-dimensional hydrothermally synthesized PZT poly-crystalline film vibrators. Transmitted ultrasound pulse from 10 MHz commercial ultrasound probe was received by the trially fabricated 1-dimensional array type ultrasound probe with hydrothermally synthesized PZT poly-crystalline film vibrators