Abstract
Recently, high-frequency miniature medical ultrasound probes with high resolution were actively developed. However, it is difficult to fabricate such tiny ultrasound probes using piezoelectric ceramic vibrator with thickness less than 100 μm. We deposited a PZT poly-crystalline film on a titanium substrate using the hydrothermal method and developed transducers using the PZT poly-crystalline film for ultrasound probes. In this study, we applied it to a miniature medical one-dimensional (1-D)-array-type ultrasound probe with resonance frequency of 10 MHz. After sputtering of pure titanium on the surface of a hydroxyapatite substrate, the titanium film was etched using the photolithography method to form a 1-D titanium film electrode array with 75 μm element pitch, 40 μm element width, and 4 mm element length to scan an ultrasound beam electronically by sector scan mode using phased-array technique. Thereby we fabricated a miniature 1-D-array-type ultrasound probe. A transmitted ultrasound pulse from 10 MHz commercial ultrasound probe was received by this fabricated 1-D-array type ultrasound probe with hydrothermally synthesized PZT poly-crystalline film vibrators.
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