Abstract
Titanium dioxide thin films were deposited on sapphire substrates by reactive dc magnetron sputtering method. The prepared thin films were then annealed in air at various temperatures (600 – 800 °C) to achieve crystalline thin films having anatase phase. The comb-like Pt electrodes, with a distance of 10 μm, were prepared on the top of the films to measure the electrical and gas sensing properties. The films prepared in this work showed high electrical response for various concentrations of H2/air, ranging from 20 to 10 000 ppm. The response was tested in the working/operating temperature range 150 – 350 °C and it was observed that these thin films are the most sensitive at temperatures below 200°C.
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