Abstract

The weak infrared response characteristics of a‐Si (Amorphous Silicon) photodiode have been investigated. The EQE (External Quantum Efficiency) of a‐Si photodiode at 850nm is about 0.03%. However, it's enough for the infrared laser interactive application. Then, we developed a novel transparent infrared flatpanel detector, which can be inserted into the LCD module, and have little influence on display.

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