Abstract
During the cleaning process of LCD production, the internal environment of wet cleaning equipment is conducive to microbial growth and can easily form biofilms. The shedding of these biofilms can result in product defects. This study employed 0.25 ppm ozone water to pass through the tank inside the wet washing equipment, which increased the number of days that the tank remained clean from 20 days to more than 130 days. And the lifespan of the filter has been extended from 10 days to over 60 days.
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